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SEM

Hionix can offer high magnitude and high resolution images of samples via SEM.

Hitachi S­4700 series, a Cold Field Emission Gun Scanning Electron Microscope (CFE­SEM), combines the versatility of PC control with a novel electron optical column to give exceptional performance on large and small specimens. The S­4700 also offers excellent low kV performance with guaranteed resolution of ~ 10 nm at 1 kV, at a working distance of 5­6mm. Images provide key qualification data to reliably measure field layer thickness and step coverage.