Thin Film Deposition is the technology of applying a very thin film of material – between a few nanometers to about 100 micrometers. Thin Film Deposition manufacturing processes are at the heart of today’s semiconductor, solar panel, CD, disk drive, and optical device industries. We have in house tools capable of thin film deposition using D-source magnetron sputtering technology. Magnetron Sputtering is a Physical Vapor Deposition(PVD) process in which a plasma is created and positively charged ions from the plasma are accelerated by an electrical field superimposed on the negatively charged electrode or "target". The positive ions are accelerated by potentials ranging from a few hundred to a few thousand electron volts and strike the negative electrode with sufficient force to dislodge and eject atoms from the target.
Tango Systems, Inc. has been manufacturing and marketing PVD systems based on the technology developed at Hionix. Tango Systems provides sputtering systems to advanced packaging, discrete and compound semiconductor industries, and uses Hionix as their customer demonstration and process technology development laboratory.